| 气敏传感器集成化的研究 |
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| 引用本文： | 林海安 吴冲若. 气敏传感器集成化的研究[J]. 微细加工技术, 1993, 0(1): 49-54 |
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| 作者姓名： | 林海安 吴冲若 |
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| 作者单位： | 东南大学电子工程系，东南大学电子工程系 南京市 210018，南京市 210018 |
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| 摘 要： | 本文回顾了气敏传感器的发展史,针对限制气敏传感器发展的诸因素,提出了解决问题的思路;指出了集成化的关键在于敏感膜的设计和制备,最后讨论了几种有前途的集成气敏传感器单元。
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| 关 键 词： | 气敏传感器 集成化 气敏元件 传感器 |
A RESEARCH ON INTEGRATION FOR GAS SENSORS |
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| Lin Haian Wu Chongrou. A RESEARCH ON INTEGRATION FOR GAS SENSORS[J]. Microfabrication Technology, 1993, 0(1): 49-54 |
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| Authors: | Lin Haian Wu Chongrou |
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| Abstract: | The developing history of gas sensors was reviewed. Some ideals, which may be used to solve the problems that limit the development of gas sensors, has been put forward. We also point out that the key of integration is the design and fabrication of sensitive films. Finally, several prospective cells of integrated gas snesors are discussed. |
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| Keywords: | gas sensor integration thin film |
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