用于微摩擦测试的微力传感器及其制作

微构件表面的摩擦状况和磨损机理与宏观构件有较大的区别，需一种能够测量微米尺度样品摩擦特性的专用仪器。给出了一种新型硅微力传感器的设计原理、结构、制作工艺及其弱信号采集方法。静态性能测试结果表明，传感器最大输出电压2000μV，重复性约为1．3％，灵敏度约为65V／N，分辨率为46μN，总精度为2．3％，基本上满足了微摩擦测试的需要。实验及计算表明，通过优化微力传感器的结构，改进芯片的封装，可以大大减少其体积，并提高其各项性能指标。

A New Force Sensor Designed for Microfriction Testing

The friction and wear mechanism are very different between micro components and macro components because of the high ratio of surface to bulk in micro components. In this paper, a special instrument is designed,which can test sample friction on micron scale.The instrument is basically composed of two micro force sensors: one sensor measures the pressure force and the other measures the friction.Aiming at a wide measurement range and high sensibility, a new silicon force sensor is presented,which can be used to test friction in MEMS's components.Its principle,construction,processing technology and measuring method of the weak signal are described. Experiments show that the sensor has the output voltage range of 2 000 mV, repeatability of 1.3%, sensibility of 65 V/N, resolution of 46 _N and precision of 2.3%. In addition, by decreasing the thickness of the silicon cantilever membrane and optimizing its package, the bulk of the sensor will be greatly decreased and its performance will be improved.