Effect of Thin Film Thicknesses and Materials on the Response of RTDs and Microthermocouples

Fabrication and thermal characterization of a resistance temperature detector (RTD) heater and microthermocouples (MTs) on silicon substrates have been reported in this paper. The influence of film thickness and nickel-gold (Au) electroplating on RTD on its steady-state temperature with respect to its steady-state electrical power input and resistance is studied. Further, the thermal effects of multiple thermocouples in a thermopile as well as the effects of Au layers in the contact pads of the thermopiles on their open-circuit Seebeck voltage are studied. Therein lies the novelty of this paper. The in situ operating relationships for the RTD heater and the MT are provided