Self-assembled interconnection by bamboo-like carbon nanotubes |
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Affiliation: | 1. Department of Nano Materials Science and Engineering, Silla University, 1 San Kwaebop-Dong, Sasang-Gu, Busan 617-736, South Korea;2. Department of Computer Science, Indiana University, Purdue University, Fort Wayne, IN 46805, USA;3. Department of Chemistry, Pusan National University, Busan 609-735, South Korea;4. Department of Science Education, Daegu National University of Education, Taegu 705-715, South Korea;5. Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon 305-701, South Korea |
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Abstract: | Carbon nanotubes (CNTs) could be formed on Si substrate using nickel catalyst under microwave plasma-enhanced chemical vapor deposition system. Under the high, negative-bias voltage (−400 V) condition, we found the formation of the carbon nanotube islands and the bamboo-like carbon nanotube interconnection lines. Most of the bamboo-like carbon nanotubes connected with the carbon nanotubes themselves, which indicates the self-assembled characteristics of the carbon nanotube interconnection lines. The self-assembled characteristics of the bamboo-like carbon nanotube interconnection lines were evaluated using computer-aided image analysis. |
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