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A two-dimensional optical cross-connect with integrated waveguides and surface micromachined crossbar switches
Affiliation:1. Corning Intellisense Corporation, Wilmington, MA 01887, USA;2. Corning Inc., Corning, NY 14831, USA;1. State Key Lab of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics & Astronautics, Nanjing, 210016, China;2. Jiangsu Engineering Laboratory of High-end Manufacturing Equipment and Technology, Nanjing University of Science and Technology, Nanjing, 210094, China;1. Department of Automotive and Traffic Engineering, Jiangsu University, Zhenjiang 212013, China;2. Shoukai Auto Parts Co. Ltd, Gaoyou 225600, China;3. Jintan Jonseen Electric Tech Corp, Changzhou 213200, China;1. Department of Civil & Environmental Engineering, University of Connecticut, Storrs, CT, 06269, United States;2. School of Energy and Environment, Southeast University, Nanjing, Jiangsu, 210096, China;3. Department of Material Science and Engineering, University of Connecticut, Storrs, CT, 06269, United States;1. School of Mechanical Engineering, Jiangsu University of Science and Technology, Zhenjiang 212000, China;2. School of Environmental and Chemical Engineering, Jiangsu University of Science and Technology, Zhenjiang 212000, China;1. Faculty of Environmental Management, Prince of Songkla University, Hat-Yai, Songkhla 90110, Thailand;2. Department of Materials Science and Technolgy, Faculty of Science, Prince of Songkla University, Hat-Yai, Songkhla 90110, Thailand
Abstract:The design, fabrication and test results of an all-optical cross-connect, which uses electrostatically actuated micromechanical digital mirrors to steer optical signals in a network of planar waveguides, are presented. The substrate consists of a network of spliced planar waveguides on silica substrates. The switches, located at the waveguide intersections, are formed with an electroplated T-structure consisting of a horizontal perforated square plate suspended by four elastic beams. When operated, the horizontal plate is pulled up making the mirror move out of the optical path thus steering the beam. An 8×8 switch array has been fabricated and tested. Actuation and relaxation switching times near 3 ms have been demonstrated with an actuation voltage of 120 V. The optical insertion loss for the array typically varied from 2.3 dB for a single trench in the optical path (shortest optical path) to 8 dB for 15 trenches in the optical path (longest optical path).
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