| 光杠杆纳米微位移测量系统中的信号处理 |
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| 引用本文： | 吴宇,刘晓旻,杨国光. 光杠杆纳米微位移测量系统中的信号处理[J]. 光电工程, 2007, 34(7): 30-34,38 |
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| 作者姓名： | 吴宇 刘晓旻 杨国光 |
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| 作者单位： | 浙江大学,现代光学仪器国家重点实验室,浙江,杭州,310027;浙江大学,现代光学仪器国家重点实验室,浙江,杭州,310027;浙江大学,现代光学仪器国家重点实验室,浙江,杭州,310027 |
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| 摘 要： | 本文提出了一种基于光杠杆原理非接触式的纳米级微位移测量系统.该系统通过光学方法对微位移量进行放大,光学放大倍数高,该系统的理论分辨率可达4nm,实际测得静态分辨率小于10nm.信号处理采用基于高精度一维PSD的信号探测电路,并且通过设计有效地抑制了噪声和干扰.实验中使用PZT作为被测物的微小位移驱动器,与电容测微仪JDC-Ⅱ所测数据进行了验证比较,系统所测得的数据证明了其正确性和可行性.并且该系统受温度影响小,结构简单,便于使用MEMS技术集成和微型化.
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| 关 键 词： | 光杠杆 纳米位移测量 PSD 信号处理 |
| 文章编号： | 1003-501X（2007）07-0030-05 |
| 收稿时间： | 2006-07-23 |
| 修稿时间： | 2006-07-232007-05-07 |
Signal process in a novel system for nano-displacement measurement based on optical lever |
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| WU Yu,LIU Xiao-min,YANG Guo-guang. Signal process in a novel system for nano-displacement measurement based on optical lever[J]. Opto-Electronic Engineering, 2007, 34(7): 30-34,38 |
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| Authors: | WU Yu LIU Xiao-min YANG Guo-guang |
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| Affiliation: | State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China |
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| Abstract: | In this paper, a novel system for nano-displacement measurement was described, which was based on the principle of optical lever. The nano-displacement was amplified contactlessly with several reflections by the parallel mirror group. Position Sensitive Detector (PSD) was used as nano-displacement signal detecting, and the signal processing circuit was designed according to anti-jamming principle. The theoretical resolution of this system could achieve 4nm. A piezoelectric transducer (PZT) was used to simulate the nano-displacement. The measured results coincide with the data detected by the capacitive displacement sensor (JDC-II) well, which demonstrate that the practical resolution is less than 10nm. The system can be integrated and minimized easily by MEMS technique because of its simple structure. |
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| Keywords: | optical lever nano-displacement measurement PSD signal process |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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