| 溶胶凝胶法制备的ZnO气敏薄膜 |
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| 引用本文： | 潘素瑛 梅森. 溶胶凝胶法制备的ZnO气敏薄膜[J]. 传感器与微系统, 1993, 0(3): 18-20,28 |
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| 作者姓名： | 潘素瑛 梅森 |
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| 作者单位： | 武汉工业大学(潘素瑛)，武汉工业大学(梅森) |
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| 摘 要： | Zn(CH_3COO)_2通过溶胶凝胶法(Sol-Gel)被制备成粒度分布均匀的ZnO气敏薄膜,固有构参数已被确定。通过XRD(X射线衍射仪)和TEM(透射电镜)的分析结果,确认膜为ZnO多晶材料,并且利用高阻计测试了在不同气氛中试件的气体灵敏度。
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| 关 键 词： | 溶胶凝胶法 氧化锌 气敏膜 |
ZnO Gas -Sensitive Films Prepared Through Sol -Gel Process |
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| Pan Suying Mei Sen. ZnO Gas -Sensitive Films Prepared Through Sol -Gel Process[J]. Transducer and Microsystem Technology, 1993, 0(3): 18-20,28 |
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| Authors: | Pan Suying Mei Sen |
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| Affiliation: | Wuhan Institute of Technology |
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| Abstract: | ZnO gas - sensitive films of fine grains which are uniformly distributed are prepared from Zn(CH3COO)2 through Sol-Gel process. Intrinsic fabric parameters were determined. By analysing the results of XRD and TEM, the films are thought as ZnO polycrystalline materials and the samples' gas-sensitivity are tested at different atmosphere by the high -resistance -meter. |
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| Keywords: | Sol -Gel ZnO Gas-sensitive film |
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