| 多晶硅还原炉倒棒原因分析 |
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| 作者单位： | ;1.昆明冶研新材料股份有限公司;2.云南省光电子硅材料制备企业重点实验室 |
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| 摘 要： | 还原炉倒棒一直是困扰各多晶硅厂的一个难题,长期倒棒现象将给生产设备造成损坏,甚至可能造成意外事故及人身伤害。通过对多晶硅生产中还原炉倒棒现象的总结分析,提出导致倒棒的主要原因和预防措施。
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| 关 键 词： | 多晶硅 硅芯 沉积过程 倒棒 |
Discussion on the reasons for the reduction of polysilicon reduction furnace |
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| Affiliation: | ,Kunming Metallurgical Research and new materials Limited by Share Ltd,Yunnan Provincial Key Laboratory of optoelectronic materials manufacturing |
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| Abstract: | Reduction furnace rod has been plagued by the problem of polysilicon factory,Long rod phenomenon will cause damage to production equipment,May even cause accidents and personal injury.In this paper, the reduction of the reduction furnace in polysilicon production,The main causes and preventive measures of the pour rod are put forward. |
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| Keywords: | polysilicon Silicon core Deposition process Fall stick |
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