精确的频域三点法直线误差分离技术

在经典频域三点法的基础上,提出了一种新的精确频域三点法直线误差分离技术,可以分离出更为精确的直线形状误差和直行误差运动。该方法通过构造周期函数,满足了频域法中进行Fourier变换的周期性条件,从而克服了经典频域三点法中直线形状误差的非封闭性、非周期性以及端点的不连续而引起的高阶谐波分量失真等边缘效应。实测结果验证了该方法的有效性。

Accurate Frequency Domain Three-point Method for Straightness Error Separation

On the basis of ordinary frequency domain three-point method, a new accurate frequency domain three-point method is presented in this paper, through which straightness error and linear error motion can be separated and obtained ac-curately. By constructing periodic function, the periodic demand of Fourier transformation will be meeted. Therefore, the edge ef-fects such as the distortion of the high-order harmonic compo-nents caused by the unclosing measurement and the discontinu-ity at edges of measurement range can be overcomed effectively. At last, comparative experiments are carried out to prove the feasibility of this method.