| 离散谱折射率法优化设计深刻蚀、单模GaAs/GaAlAs脊形光波导 |
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| 引用本文： | 马慧莲,杨建义,江晓清,王明华.离散谱折射率法优化设计深刻蚀、单模GaAs/GaAlAs脊形光波导[J].半导体学报,2001,22(4). |
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| 作者姓名： | 马慧莲 杨建义 江晓清 王明华 |
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| 作者单位： | 浙江大学信息与电子工程学系, |
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| 基金项目： | 国家自然科学基金，国家重点基础研究发展计划(973计划) |
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| 摘 要： | 采用离散谱折射率法对深刻蚀GaAs/GaAlAs多层脊形光波导的特性作了详细的理论分析，并对所获得的较大截面、低损耗的单模脊形光波导的制作容差性作了进一步的分析．计算表明，用离散谱折射率法获得的单模脊形光波导具有较大的制作容差性．
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| 关 键 词： | 离散谱折射率法 深刻蚀 GaAs/GaAlAs |
Optimization of Deep-Etched,Single-Mode GaAs/GaAlAs Optical Rib Waveguides Using Discrete Spectral Index Method |
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| MA Hui-lian,YANG Jian-yi,JIANG Xiao-qing,WANG Ming-hua.Optimization of Deep-Etched,Single-Mode GaAs/GaAlAs Optical Rib Waveguides Using Discrete Spectral Index Method[J].Chinese Journal of Semiconductors,2001,22(4). |
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| Authors: | MA Hui-lian YANG Jian-yi JIANG Xiao-qing WANG Ming-hua |
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| Abstract: | A more detailed analysis of deep-etched,single-mode GaAs/GaAlAs multiple-layer optical rib waveguides is presented using the discrete spectral index method (DSIM).The fabrication tolerance of the obtained low-loss,single-mode optical rib waveguides with a large mode size is analysed as well.The result indicates that single-mode rib waveguides obtained by this method have large fabrication tolerance. |
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