| MEMS微执行器平板运动稳定性研究 |
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| 引用本文： | 伍文昌,鲍景富,杜亦佳,涂程.MEMS微执行器平板运动稳定性研究[J].微纳电子技术,2011,48(1):46-52. |
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| 作者姓名： | 伍文昌 鲍景富 杜亦佳 涂程 |
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| 作者单位： | 电子科技大学电子工程学院,成都,611731 |
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| 基金项目： | 国家部委基金项目(9140A23060409DZ02) |
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| 摘 要： | 在MEMS静电执行器设计中,由于吸合效应的存在,导致微执行器调节范围受到限制.首先,对微执行器吸合效应产生的原因及其影响进行了分析与阐述.然后,针对吸合效应所带来的问题,给出了多种解决方法,以及与这些方法相关的技术进展.最后,对这些方法的性能及优缺点进行了总结.这些解决MEMS微执行器吸合效应的方法分为三种:利用反馈方...
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| 关 键 词： | 微机电系统(MEMS) 静电微执行器 串联反馈 吸合效应 稳定范围 |
Research on the Movement Stability of the Plate in the MEMS Microactuator |
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| Wu Wenchang,Bao Jingfu,Du Yijia,Tu Cheng.Research on the Movement Stability of the Plate in the MEMS Microactuator[J].Micronanoelectronic Technology,2011,48(1):46-52. |
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| Authors: | Wu Wenchang Bao Jingfu Du Yijia Tu Cheng |
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| Affiliation: | Wu Wenchang,Bao Jingfu,Du Yijia,Tu Cheng (School of Electronic Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China) |
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| Abstract: | In the design of the MEMS electrostatic actuator,the adjusting range of the micro actuator is limited due to the existence of the pull-in effect.First of all,the effect causes of the micro actuator and its influence were analyzed and expounded.Then,according to the problems brought by the effect of the micro actuator,a variety of solutions were presented,as well as the related technical progress of these solutions.Finally,the performances,advantages and disadvantages of these solutions were summarized.These... |
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| Keywords: | micro electronic mechanical system(MEMS) electrostatic micro actuator series feedback pull-in effect stability range |
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