| 氮化铝陶瓷烧结炉温度均匀性对烧结产品质量影响的研究 |
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| 引用本文： | 王磊. 氮化铝陶瓷烧结炉温度均匀性对烧结产品质量影响的研究[J]. 电子工业专用设备, 2010, 39(6): 34-36,53 |
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| 作者姓名： | 王磊 |
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| 作者单位： | 河北半导体研究所,河北,石家庄,050051 |
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| 摘 要： | 氮化铝陶瓷是近年来广受关注的一种新型陶瓷材料,是剧毒氧化铍的替代材料,其在高功率电子领域有着相当广泛的应用前景,但是氮化铝陶瓷是难烧结的非氧化物陶瓷,陶瓷的烧结对氮化铝陶瓷性能的影响非常大,尤其是在氮化铝陶瓷批量生产过程中,陶瓷烧结炉的温度不均匀,将导致陶瓷性能的巨大差异。简要介绍了氮化铝陶瓷烧结炉温度均匀性对烧结产品质量的影响。
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| 关 键 词： | 氮化铝(AIN) 烧结炉 温度均匀性 批量生产 |
Research on Temperature Uniformity of Aluminum Nitride Sintering Furnace to Quality of the Products |
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| WANG Lei. Research on Temperature Uniformity of Aluminum Nitride Sintering Furnace to Quality of the Products[J]. Equipment for Electronic Products Marufacturing, 2010, 39(6): 34-36,53 |
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| Authors: | WANG Lei |
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| Affiliation: | WANG Lei (Hebei Semiconductor Research Institute, Shijiazhuang 050051, China) |
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| Abstract: | Aluminum nitride ceramics is a wide concern new type of ceramic material in recent years, it is a ideal alternative to highly toxic beryllium oxide, and it has a broad application prospects in high-power electronics. However, aluminum nitride ceramics is a difficult sintering non-oxide ceramics mateial, the effects of sintering on properties of AlN is very large, especially in the mass production process. If the sintering furnace temperature is non-uniform, it will lead to huge differences in properties of ceramics. This article briefly describes temperature uniformity of aluminum nitride sintering furnace and quality of the products were analyzed. |
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| Keywords: | AlN Sintering furnace Temperature uniformity Mass production |
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