| 喷雾热解法制备掺氟的氧化锡透明导电膜 |
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| 引用本文： | 郝喜红,许启明,赵鹏,姚燕燕,田晓珍.喷雾热解法制备掺氟的氧化锡透明导电膜[J].电子元件与材料,2005,24(2):7-10. |
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| 作者姓名： | 郝喜红 许启明 赵鹏 姚燕燕 田晓珍 |
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| 作者单位： | 西安建筑科技大学材料科学与工程学院,陕西,西安,710055;西安建筑科技大学材料科学与工程学院,陕西,西安,710055;西安建筑科技大学材料科学与工程学院,陕西,西安,710055;西安建筑科技大学材料科学与工程学院,陕西,西安,710055;西安建筑科技大学材料科学与工程学院,陕西,西安,710055 |
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| 基金项目： | 教育部重点项目;陕西省西安市科技局资助项目 |
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| 摘 要： | 采用喷雾热分解的方法,在片状日用玻璃基材和石英玻璃基材上制得了掺氟氧化锡透明导电薄膜。研究了F 的掺杂量、成膜温度和沉积时间对薄膜方阻 R□和在可见光范围内的平均透过率 T 的影响。实验结果表明,当 NH4F的掺杂量为 SnCl_4·5H_2O 的 32%(质量分数)、成膜温度为 450℃、沉积时间为 15 s 时,可使所得薄膜的方阻 R_□最低,为 10Ω/□,可见光范围内的平均透过率为 80%。
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| 关 键 词： | 无机非金属材料 掺氟二氧化锡薄膜 喷雾热分解 制备 导电性能 光学性能 |
| 文章编号： | 1001-2028(2005)02-0007-04 |
Preparation of Transparent Conducting Thin Films of Fluorine-doped Tin Oxide with Spray Pyrolysis Process |
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| HAO Xi-hong,XU Qi-ming,ZHAO Peng,YAO Yan-yan,TIAN Xiao-zhen.Preparation of Transparent Conducting Thin Films of Fluorine-doped Tin Oxide with Spray Pyrolysis Process[J].Electronic Components & Materials,2005,24(2):7-10. |
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| Authors: | HAO Xi-hong XU Qi-ming ZHAO Peng YAO Yan-yan TIAN Xiao-zhen |
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| Abstract: | The Fluorine-doped SnO2 thin films were prepared on the soda-lime glass and quartz glass flat substrates by spray pyrolysis process. The effects of F contents,deposition temperature as well as deposition time on the sheet resistance and average transmission rate in visual spectra of the thin films were investigated. The results show that the R□ of the F doped SnO2 thin films reach 10 ?/□ and the average transmission rate in visual spectra is 80%, with the NH4F doped as 32wt% SnCl4·5H2O in the initial solution and deposited for 15 s at 450℃. |
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| Keywords: | inorganic non-metallic materials fluorine-doped tin dioxide thin film spray pyrolysis preparation electric property optical properity |
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