| 光学元件面形的环路径向剪切干涉检测方法研究 |
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| 引用本文： | 赵云影,赵刚,李大海,鲍丙芳.光学元件面形的环路径向剪切干涉检测方法研究[J].四川激光,2007,28(1):39-40. |
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| 作者姓名： | 赵云影 赵刚 李大海 鲍丙芳 |
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| 作者单位： | 四川大学电子信息学院,成都610065 |
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| 摘 要： | 提出了将环路径向剪切干涉(CRSI,Cyclic Radial Shearing Interferometry)术应用于光学元件面形检测的新方法.设计了基于环路径向剪切干涉检测光学元件面形的光路系统.根据环路径向剪切干涉法的波前重建算法,模拟计算了任意波前的重建情况,同时在基于开普勒望远系统的环路径向剪切干涉仪上实际测量了一个已知光学元件的面形.结果表明,文中提出的波前重建算法和采用的光路系统可用于实际光学元件面形的准确检测,系统的重复性也得到了研究.
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| 关 键 词： | 光学测量 环路径向剪切干涉 波前重建 面形测量 光学元件 面形检测 环路径向剪切干涉 检测方法 研究 shearing interferometry radial cyclic based measurement optics 开普勒望远系统 准确检测 结果 实际测量 径向剪切干涉仪 情况 重建算法 模拟计算 波前 |
| 文章编号： | 0253-2743（2007）01-0039-02 |
| 收稿时间： | 2006-04-06 |
| 修稿时间： | 04 6 2006 12:00AM |
The study of optics measurement based on cyclic radial shearing interferometry |
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| ZHAO Yun-ying,ZHAO Gang,LI Da-hai,BAO Bing-fang.The study of optics measurement based on cyclic radial shearing interferometry[J].Laser Journal,2007,28(1):39-40. |
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| Authors: | ZHAO Yun-ying ZHAO Gang LI Da-hai BAO Bing-fang |
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| Affiliation: | School of Electronics and Information, Sichuan University, Chengdu 610065, China |
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| Abstract: | A method for optics measurement based on the cyclic radial sheafing intederometry is proposed. The optical system for optics measurement is designed based on this technique. According to the wavefront reconstruction algorithm of the cyclic radial shearing interferometry, the reconstruction of a arbitrary wavcfront is implemented from the corresponding CRSI interferogram. And experiments have been done successfully to measure the surface of a practical optics based on Keplerlan tdescope system. The results show that both the wavefront reconstruction algorithm and the optical system are able to exactly test the optics surface. And the repeatability of the setup is analyzed. |
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| Keywords: | optical measurement cyclic radial sheafing intefferemetry wavefront reconstruction surface shape measurement |
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