一种优化超稳光学腔的数值方法

为了降低超稳光学腔的振动敏感度，在综合考虑振动所导致的腔镜位移及转动后，定义了一个新的表征腔体振动敏感度的参量。采用有限元数值分析方法，用所定义的单一参量优化了一个典型的立式超稳光学腔。优化过程考虑了腔体端面直径、支撑孔位置和深度等关键几何参量。结果表明，优化后的腔体结构和支撑方式可以明显降低超稳腔对振动的敏感度，腔体稳定性比优化前提高1.5倍。该优化方法操作性强，能够有效提升超稳腔仿真和设计的效率。

A numerical optimization method for ultra-stable optical cavities

In order to reduce the vibration sensitivity of ultra-stable optical cavity, a new parameter was defined to characterize the vibration sensitivity of optical cavity by considering the displacement and rotation of mirrors. Based on the finite element analysis method, a typical vertical ultra-stable optical cavity was optimized by using the defined single parameter. In the optimization process, the key geometric parameters, including the cavity diameter, position and depth of supporting hole were took into account. The results show that the optimized cavity structure and support method could obviously reduce the vibration sensitivity of ultra-stable cavity. The stability of cavity was 1. 5 times higher than that before optimization. The optimization method with good feasibility could improve the efficiency of simulation and design of ultra-stable cavities.