TiAlBN多元膜的性能与组织结构研究 |
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引用本文: | 谢致薇,王国庆,杨元政,白晓军,匡同春,谢光荣,胡社军.TiAlBN多元膜的性能与组织结构研究[J].钛工业进展,2004,21(3):24-29. |
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作者姓名: | 谢致薇 王国庆 杨元政 白晓军 匡同春 谢光荣 胡社军 |
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作者单位: | 1. 广东工业大学材料与能源学院,广东,广州,510643 2. 广东工业大学轻工化工学院,广东,广州,510080 3. 广东工业大学实验研究中心,广东,广州,510080 |
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摘 要: | 采用电弧离子镀技术、TA5钛合金靶沉积TiAlBN薄膜,研究了这种多元膜的显微硬度、高温氧化性能和组织结构,结果表明:这种多元膜具有优于TiN膜的显微硬度;不同于TiN膜的显微组织,其最显著的特征是存在一些细小的钛滴;双靶工作状态下,这些钛滴与膜之间的融合效果较好,膜层表面孔隙较少;薄膜具有TiN的面心立方结构,与TiN膜相比,具有更加明显的择优取向趋势。
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关 键 词: | TiAlBN 多元膜 性能 组织结构 电弧离子镀 氮化物 |
修稿时间: | 2003年8月11日 |
Study of Performances and Microstructure of TiAlBN Films |
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Authors: | Xie Zhiwei Wang Guoqing Yang Yuanzheng Bai Xiaojun Kuang Tongchun Xie Guangyrong Hu Shejun |
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Abstract: | TiAlBN films have been deposited by cathode arc ion-plating with TA5 titanium alloy target. The performance and microstructure have been studied. The results show that the microhardness of the multi-component films is higher than that of TiN films. The films have better high temperature oxidation performance than that of TiN films. The microstructure of the multi-component films is quite different from TiN films. The microstructure of the multi-component films is characteristic of some small titanium droplets. The titanium droplets are combined with the films substrate and there are a few pores in the films surface in the condition of double targets. It is found that the preferred orientation exists in the films. |
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Keywords: | multi-component films nitride cathode arc ion-plating |
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