| 激光双焦干涉球面轮廓仪实时扫描及数据处理系统 |
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| 引用本文： | 杨甬英,卓永模,徐敏.激光双焦干涉球面轮廓仪实时扫描及数据处理系统[J].光学仪器,1994(Z1). |
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| 作者姓名： | 杨甬英 卓永模 徐敏 |
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| 作者单位： | 浙江大学光科系!杭州，310027，浙江大学光科系!杭州，310027，浙江大学光科系!杭州，310027 |
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| 摘 要： | 介绍了一种双焦干涉球面扫描轮廓仪，该仪器利用计算机及自动控制系统对曲率半径从±5mm～±30mm的球面进行扫描驱动及采样，并将球面轮廊信号通过A/D转换及数据处理后显示打印表面轮廓参数。整个系统功能齐全。
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| 关 键 词： | 双焦干涉 轮廓仪 实时扫描 数据处理 |
The System on Real-time Scanning and Data Treating of the Double Focus Laser Interference Spherical Profilometer |
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| Yang Yong-Ying,Zhuo Yong-mo,Xu Ming.The System on Real-time Scanning and Data Treating of the Double Focus Laser Interference Spherical Profilometer[J].Optical Instruments,1994(Z1). |
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| Authors: | Yang Yong-Ying Zhuo Yong-mo Xu Ming |
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| Abstract: | The double focus interference spherical scanning profjlometer is introduced in this pa-Per. Using computer and its automatic control system,the Ptofilometer can scan the sPhere, the radius of curvature from + 5 millimeter to + 30 millimeter, and take samples. The surface profiles pearneters are disPlayed and Ptinted after A/D conversion and data Processing. All functions of the System is well. The new technique and instrument are entirely suitable for sPherical profiles self-testing. |
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| Keywords: | Double Focus Interference Profilometer Real-tine Scanning Data Treating |
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