Thermal Properties Measurement of Micro-electromechanical System Sensors by Digital Moire Method

Abstract:  The thermal properties of a micro-electromechanical system sensor were analysed by a novel digital moiré method. A double-layer micro-cantilever sensor (60  μ m long, 10  μ m width and 2  μ m thick) was prepared by focused ion beam milling. A grating with frequency of 5000 lines mm⁻¹ was etched on the cantilever. The sensor was placed into a scanning electron microscope system with a high temperature device. The observation and recording of the thermal deformation of the grating were realised in real-time as the temperature rose from room temperature to 300 °C at intervals of 50 °C. Digital moiré was generated by interference of the deformed grating and a digital virtual grating. The thermal properties including strain distribution of the sensor and the linear expansion coefficient of polysilicon were accurately measured by the phase-shifted moiré patterns.