n- and p-channel m.o.s.f.e.t.s as Rayleigh-surface-wave detectors

We have studied the piezoresistance effect in an m.o.s.f.e.t. structure used as a Rayleigh-surface-wave transducer. The investigation was carried out over a large frequency range about a central value of 100 MHz. Results for silicon?m.o.s.f.e.t. n- and p- channel inversion layers are given.