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一种改进石榴石磁光膜(盘)性能的新型热处理技术的研究
引用本文:张怀武 章思俊. 一种改进石榴石磁光膜(盘)性能的新型热处理技术的研究[J]. 半导体光电, 1993, 14(2): 152-155
作者姓名:张怀武 章思俊
作者单位:中国西南应用磁学研究所 绵阳 621000
摘    要:本文给出了一种快速周期退火这一新技术。用它对 RF 磁控溅射法制备的石榴石磁光膜进行热处理光学均匀性变好,晶粒尺寸减小(30nm),法拉第效应增强,矫顽力增大。膜结构的 X 射线衍射分析表明,多周期退火的样品仅呈现单相石榴石,较少周期退火的样品除石榴石相外,还有 DyFeO_3相析出。对上述结果作了理论分析。

关 键 词:磁光膜 热处理 退火 磁光盘

Study on New Technique of Rapidly Recurrent Post-annealing to Garnet M-O Film(Disc)
Zhang Huiawu Guo Bijun Luo Dimin. Study on New Technique of Rapidly Recurrent Post-annealing to Garnet M-O Film(Disc)[J]. Semiconductor Optoelectronics, 1993, 14(2): 152-155
Authors:Zhang Huiawu Guo Bijun Luo Dimin
Abstract:A new technique of rapidly recurrent post-annealing is reported in this paper.Using the technique,we have obtained a high quality film which exhibits smooth surface,fine crystallisation and excellent Faraday effect.The x-ray diffrac- tion analysis showed that there existed only single garnet phase for the multi-recur- rent samples whereas DyFeO_3 phase was also separarted out in less recurrent sam- pies,except the garnet phase.The theoretical analysis is carried out on the men- tioned above.
Keywords:Megneto-optical Film  Thermal-treatment  Annealing
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