| Si/TiNi双层结构SMA电热驱动器的仿真和制造 |
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| 引用本文： | 王亚攀,吴义伯,张小波,张丛春,杨春生. Si/TiNi双层结构SMA电热驱动器的仿真和制造[J]. 微纳电子技术, 2010, 47(2). DOI: 10.3969/j.issn.1671-4776.2010.02.007 |
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| 作者姓名： | 王亚攀 吴义伯 张小波 张丛春 杨春生 |
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| 作者单位： | 上海交通大学,微纳科学技术研究院,微米/纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海,200240 |
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| 基金项目： | 国家自然科学基金资助项目(50675139);;国家高技术研究发展计划“863”资助项目(2007AA04Z338) |
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| 摘 要： | 使用射频磁控溅射法,在Si片上沉积了TiNi形状记忆合金薄膜,分别采用能谱色散光谱仪(EDS)和差示扫描热量分析(DSC)方法测试了薄膜的成分和相变特征温度,并通过给形状记忆合金(SMA)薄膜加热及冷却,观察薄膜的形变恢复情况,定性测试了SMA的形状记忆特性。在此基础上,设计并制造了一种SMA薄膜/Si膜复合膜悬臂梁结构的微驱动器。在室温下,SMA电热驱动器的悬臂梁是平直的;由于TiNi合金具有相变和形状记忆特性,当TiNi电极加上电压后,悬臂梁会产生弯曲。测试结果表明,在2.0V电压下,驱动器悬臂梁端部的驱动位移可达到70.5μm,功耗为20mW。
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| 关 键 词： | 电热驱动器 双层结构 TiNi基形状记忆合金薄膜 ANSYS仿真 Si微细加工技术 |
Simulation and Fabrication of an SMA Electro-Thermal Actuator with Si/TiNi Bimorph Structure |
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| Wang Yapan,Wu Yibo,Zhang Xiaobo,Zhang Congchun,Yang Chunsheng. Simulation and Fabrication of an SMA Electro-Thermal Actuator with Si/TiNi Bimorph Structure[J]. Micronanoelectronic Technology, 2010, 47(2). DOI: 10.3969/j.issn.1671-4776.2010.02.007 |
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| Authors: | Wang Yapan Wu Yibo Zhang Xiaobo Zhang Congchun Yang Chunsheng |
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| Affiliation: | Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education;National Key Laboratory of Micro/Nano Fabrication Technology;Research Institute of Micro/Nano Science and Technology;Shanghai Jiao Tong University;Shanghai 200240;China |
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| Abstract: | TiNi-based shape memory alloy films were deposited on Si substrates by sputtering TiNi target.The composition of the film was tested by energy dispersive spectrograph(EDS).The results of differential scanning calorimetry(DSC)reveal the martensitic transformation and good shape memory effect upon heating and cooling.A type of shape memory alloy(SMA)actuator with a cantilever structure based on the TiNi/Si bimorph actuation mechanism was designed,and then was fabricated by using Si micro-machining technology.... |
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| Keywords: | electro-thermal actuator double layer structure TiNi-based shape memory alloy film ANSYS simulation Si micro-machining technology |
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