Polyimide-silica microcomposite films |
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Authors: | E. Breval M. L. Mulvihill J. P. Dougherty R. E. Newnham |
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Affiliation: | (1) Center for Dielectric Studies, Materials Research Laboratory, Pennsylvania State University, 16802 University Park, PA, USA |
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Abstract: | Planarizing films of fine-grained silica embedded in polyimide have been prepared by a spincoating technique and their structure has been investigated by optical and electron microscopy. The films were found to be diphasic. A silica content near 9 vol% yields a well mixed silica/polyimide composite which is homogeneous down to nanometre scale and has good planarization characteristics. Films with contents of 3 and 6 vol% silica have rough surfaces and exhibit two forms of segregation. In the 3% case, elongated inclusions of such silica/polyimide material appear at 100- m islands in a pure polyimide matrix. In the 6% case, the pure polyimide appears as 100- m elongated lakes surrounded by silica/polyimide material. |
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