基于微机械加速度计的振速水听器的设计与分析

对基于惯性传感器的同振球型振速水听器的工作原理进行了说明.采用多端口组件网络方法建立了用于振速水听器的梳齿式硅微机械加速度计的系统级模型.对内置加速度计,外部采用弹性连接的振速水听器在平面声波作用下的响应进行了仿真分析.分析结果表明,振速水听器不失真测量的工作带宽取决于其与水介质的密度比、波尺寸、与弹性连接构成振动系统以及加速度计自身振动系统的特性参数.多端口组件网络方法能够有效地实现振速水听器的建模与仿真.

Design and Analysis of Velocity Hydrophone with Co-oscillating Sphere and Inner MEMS Accelerometers

The principle of velocity hydrophone with co-oscillating sphere was introduced. Finger-shaped micromachined silicon accelerometer was applied in the velocity hydrophone design and its system-level model of it was constructed using multi-port-element network modeling method. When subjected to an acoustic plane wave,the response of MEMS accelerometer inside the velocity hydrophone with external suspension system was analyzed. The results indicate that besides density and dimension, the bandwidth of velocity hydrophone with good fidelity is decided by the characters of both vibration systems, the external suspension system and the accelerometer itself. Modeling and simulation of the velocity hydrophone with inner accelerometer can be performed with multi-port-element network modeling method effectively.