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| 本征和Al3+掺杂ZnO薄膜的特性研究 | |
| 引用本文： | 宋立媛,唐利斌,姬荣斌,刘新近,陈雪梅,薛经纬,庄继胜,王茺,杨宇. 本征和Al3+掺杂ZnO薄膜的特性研究[J]. 红外技术, 2012, 34(5): 256-259 |
| 作者姓名： | 宋立媛 唐利斌 姬荣斌 刘新近 陈雪梅 薛经纬 庄继胜 王茺 杨宇 |
| 作者单位： | 1. 云南大学工程技术研究院,光电信息材料研究所,昆明650091;昆明物理研究所,云南昆明650223 2. 昆明物理研究所,云南昆明,650223 3. 云南大学工程技术研究院,光电信息材料研究所,昆明650091 |
| 基金项目： | 国家自然科学基金，兵器支撑项目资助 |
| 摘 要： | 采用溶胶-凝胶方法在载玻片衬底上制备了本征及不同Al3+掺杂浓度的ZnO:Al薄膜,利用X射线衍射(XRD)、原子力显微镜,紫外-可见光吸收光谱及霍尔效应研究了Al3+掺杂浓度对ZnO:Al薄膜结构和光电性能的影响。结果显示,ZnO:Al薄膜为六角纤锌矿晶体结构,具有很高的沿c轴的(002)择优取向,Al3+掺杂并没有改变ZnO的晶体结构,只是Al取代了Zn;掺杂前后薄膜样品均在ZnO带边吸收的位置有较强的吸收而在可见光范围吸收较小;并且当Al3+掺杂浓度为1.5%(摩尔百分比)时所获得的ZnO:Al薄膜具有最小的电阻率,为26Ωcm。 |
| 关 键 词： | ZnO:Al薄膜 X射线衍射 紫外-可见光吸收光谱 霍尔效应 |
| 收稿时间： | 2012-01-20 |
Properties of Intrinsic and Aluminum-doped ZnO Thin Films |
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| SONG Li-yuan , TANG Li-bin , JI Rong-bin , LIU Xin-jin , CHEN Xue-mei , XUE Jing-wei , ZHUANG Ji-sheng , WANG Chong , YANG Yu. Properties of Intrinsic and Aluminum-doped ZnO Thin Films[J]. Infrared Technology, 2012, 34(5): 256-259 | |
| Authors: | SONG Li-yuan TANG Li-bin JI Rong-bin LIU Xin-jin CHEN Xue-mei XUE Jing-wei ZHUANG Ji-sheng WANG Chong YANG Yu |
| Affiliation: | 1(1.Institute for Optoelectronic Materials,School of Engineering & Technique,Yunnan University,Kunming 650091,China; 2.Kunming Institute of Physics,Kunming 650223,China) |
| Abstract: | ZnO:Al thin films were prepared on the glass substrates by Sol-Gel method. The effects of Al3＋dopant concentration on the structural, optical and electrical properties of ZnO:Al films were studied by X-ray diffraction, AFM, UV-Vis absorption spectrum and Hall effect. The results indicated that the ZnO:Al thin films have a preferred c-axis (002) orientation perpendicular to the substrates, it seems that no effect on the crystal structure with adding various Al3＋ dopant concentrations. The thin films still have the high visible transmittance. It was observed that 1.5 atm.% Al3＋ dopant concentration of ZnO:Al film makes the film to achieve the minimum resistivity. |
| Keywords: | Key words：ZnO:Al thin films，XRD，UV-Vis Absorption spectrum，electrical properties |
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