SET/CMOS hybrid process and multiband filtering circuits |
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Authors: | Ki-Whan Song Yong Kyu Lee Jae Sung Sim Hoon Jeoung Jong Duk Lee Byung-Gook Park You Seung Jin Young-Wug Kim |
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Affiliation: | Sch. of Electr. Eng., Seoul Nat. Univ., South Korea; |
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Abstract: | We have developed an integration technology for the single electron transistor (SET)/CMOS hybrid systems. SET and CMOS transistors can be optimized without any possible degradation due to mixing dissimilar devices by adopting just one extra mask step for the separate gate oxidation (SGOX). We have confirmed that discrete devices show ideal characteristics required for the SET/CMOS hybrid systems. An SET shows obvious Coulomb oscillations with a 200-mV period and CMOS transistors show high voltage gain. Based on the hybrid process, new hybrid circuits, called periodic multiband filters, are proposed and successfully implemented. The new filter is designed to perform a filtering operation according to the periodic multiple blocking bands of which a period is originated from the SET. Such a novel function was implemented efficiently with a few transistors by making full use of the periodic nature of SET characteristics. |
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