| 用XPS法研究硅基硫化锌薄膜 |
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| 引用本文： | 曾明刚,陈松岩,林爱清,邓彩玲,蔡贝妮. 用XPS法研究硅基硫化锌薄膜[J]. 半导体技术, 2005, 30(2): 17-20 |
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| 作者姓名： | 曾明刚 陈松岩 林爱清 邓彩玲 蔡贝妮 |
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| 作者单位： | 厦门大学物理系,福建,厦门,361005;厦门大学物理系,福建,厦门,361005;厦门大学物理系,福建,厦门,361005;厦门大学物理系,福建,厦门,361005;厦门大学物理系,福建,厦门,361005 |
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| 基金项目： | 福建省自然科学基金 , 厦门大学校科研和教改项目 |
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| 摘 要： | 应用X射线光电子能谱(XPS)研究Si基ZnS:Cu,Er薄膜的化学元素组成、分布和价态,认为Cu元素只有少数部分进入晶格中替代Zn2 起激活剂的作用,Er元素在ZnS基质中分布不均匀,且会与氧结合.PL测试发现样品发绿光,主要发光峰出现劈裂,对研究薄膜中的杂质中心、实现Si基发光有参考意义.
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| 关 键 词： | X射线光电子能谱 杂质中心 Si基材料 |
| 文章编号： | 1003-353X(2004)02-0017-04 |
| 修稿时间： | 2004-04-16 |
Study of Silica-base ZnS Thin Film by Means of XPS |
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| ZENG Ming-gang,CHEN Song-yan,LIN Ai-qing,DENG Cai-ling,CAI Bei-ni. Study of Silica-base ZnS Thin Film by Means of XPS[J]. Semiconductor Technology, 2005, 30(2): 17-20 |
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| Authors: | ZENG Ming-gang CHEN Song-yan LIN Ai-qing DENG Cai-ling CAI Bei-ni |
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| Abstract: | The elementary composition, valence state and distribution of silica-base ZnS:Cu,Er thin film were surveyed by X-ray photoelectron spectrum(XPS). It is considered that only a little copper element diffuse into the crystal lattice and plays a role as the activators. The distribution of erbium is inhomogeneous, some erbium ions can combine with oxygen, thus will increase the luminous efficiency. The results are referable in study of impurity centre in the thin film and give some insight in realizing the silica-base luminous devices. |
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| Keywords: | X-ray photoelectron spectrum(XPS) impurity centre silica-base material |
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