影响氮化硅陶瓷内圆磨削加工表面形貌因素分析

目的研究氮化硅陶瓷在内圆磨削时不同的磨削参数：砂轮线速度（vs）、径向进给速度（f）、轴向振荡速度（fa）对表面粗糙度的影响.方法采用树脂结合剂金刚石砂轮对氮化硅陶瓷试件进行内圆加工实验,进行了3因素的均匀实验.建立了氮化硅陶瓷内圆磨削的经验公式,利用Taylor-Hobson Surtroni25型接触式粗糙度仪对加工表面进行测量,得到不同磨削参数下的粗糙度;用日立S-4800冷场发射电子显微镜对加工表面进行观测,得到被磨试件的表面形貌图像.结果加工表面粗糙度随砂轮线速度的增大而减小,随径向进给速度的增大而增大,随轴向振荡速度的增大而减小.砂轮线速度对被加工表面粗糙度影响最大,随着砂轮速度的增大,粗糙度由0.340 1μm下降到0.295 0μm.结论明确了内圆磨削氮化硅陶瓷试件时不同磨削参数对表面粗糙度的影响,通过回归分析,探索出了不同线速度下氮化硅陶瓷材料去除机理对其表面形貌产生的影响.

Analysis on the Factors that Influences on the Internal Grinded Surface of Silicon Nitride Ceramic

Different grinding parameters of silicon nitride ceramic in internal grinding process have been studied：the impact of grinding speed（ vs）,radial feed speed（f） and axial oscillation speed（fa） to the roughness of silicon nitride ferrule internal surface. Silicon nitride ceramic ferrule internal circle w ere performed based on the resin bond diamond grinding w heel the grinding experiments. The uniform experiments of 3 factors have been accomplished. The surface roughness of grinded w orks w as measured by Taylor-Hobson Surtronic 25 type contact roughness instrument and roughness of different parameters has been acquired. The image of the grinded surface topography w as acquired by observing the grinded surface w ith Hitachi S-4800 field-emission cold electron microscope. With the increase of the line speed,the roughness decreases w hile the radial feed speed and axial oscillation speed increase. The grinding speed of the grinding w heel has the great influences on the roughness of the grinded. With the increase of the grinding speed,the roughness of the grinded surface declines from 0. 340 1 μm to 0. 295 0 μm. It has studied the impact of the grinding parameters to the grinded surface in the experiment of silicon nitride ceramics’ internal grinding and established the empirical formula for silicon nitride ceramics’ internal grinding. The effects of silicon nitride ce-ramic material’s removal mechanisms under different line speeds on its surface topography have been explored.