| 固着磨料加工碳化硅反射镜的材料去除率及表面粗糙度的理论研究 |
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| 引用本文： | 王旭,张学军.固着磨料加工碳化硅反射镜的材料去除率及表面粗糙度的理论研究[J].光学精密工程,2009,17(3):513-518. |
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| 作者姓名： | 王旭 张学军 |
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| 作者单位： | 王旭,WANG Xu(中国科学院,长春光学精密机械与物理研究所,光学系统先进制造技术重点实验室,吉林,长春,130033);张学军,ZHANG Xue-jun(中国科学院,研究生院,北京,100039)
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| 基金项目： | 中国科学院长春光学精密机械与物理研究所创新工程资助项目 |
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| 摘 要： | 本文基于固着磨料加工碳化硅反射镜的微观作用原理，理论上定量分析探讨了金刚石磨料压入碳化硅工件的深度对材料去除率、光学元件表面粗糙度的影响，分别获得了材料去除率数学模型及粗糙度的仿真计算结果。通过去除率及粗糙度的实验与理论模型的对比结果来看，实验值虽与理论值有偏差，但基本稳定在同一数量级内，由此验证了理论分析的正确性。固着磨料工艺的这一易于理论预测的特性对实际的光学加工有着极为重要的意义，因此这种较为新颖的固着磨料工艺在碳化硅反射镜加工领域内有着广阔的应用前景。
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| 关 键 词： | 固着磨料 碳化硅 丸片 去除率 粗糙度 |
| 收稿时间： | 2008-06-04 |
| 修稿时间： | 2008-07-02 |
Theoretical study on removal rate and surface roughness in grinding SiC mirror with fixed abrasive |
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| WANG Xu,ZHANG Xue-jun.Theoretical study on removal rate and surface roughness in grinding SiC mirror with fixed abrasive[J].Optics and Precision Engineering,2009,17(3):513-518. |
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| Authors: | WANG Xu ZHANG Xue-jun |
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| Affiliation: | 1.Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of Optics;Fine Mechanics and Physics;Chinese Academy of Sciences;Changchun 130033;China;2.Graduate University of Chinese Academy of Sciences;Beijing 100039; |
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| Abstract: | Based on micro-interaction principle of fabricating SiC material with fixed abrasive, this paper quantitatively discussed the influence of depth of diamond abrasive formed in SiC workpiece on the material removal rate and surface roughness of optical component. The mathematical model of material removal rate and the simulation results of surface roughness were obtained, respectively. By comparison of experimental results with theory in material removal rate and surface roughness, the trend of theoretical an... |
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| Keywords: | SiC mirror fixed abrasive pellet removal rate surface roughness |
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