Refractive index sensor based on the diamond like carbon diffraction grating |
| |
Authors: | Tomas Tamulevi?ius Rimas Šeperys Mindaugas Andrulevi?ius Vitoldas Kopustinskas Šarūnas Meškinis Sigitas Tamulevi?ius |
| |
Affiliation: | Institute of Materials Science of Kaunas University of Technology, Savanori? Ave. 271, LT-50131, Kaunas, Lithuania |
| |
Abstract: | In this work we present an optical refractive index (RI) sensor based on the spectral analysis of anomalies in the optical response from the diffraction grating employing polarized polychromatic light. The sensor consists of holographic diffraction grating (period 423.5 nm) coated with a thin (110 nm) SiOx doped diamond like carbon film (DLC) that defines sensitivity of the sensor as well as the range of the spectral analysis. The deposition of the DLC film (synthesized by the direct ion beam deposition from the hydrocarbon source) has influence on the shape but not on the position of the anomalies observed in the specular reflection spectrum. From the reflection spectra the RI dispersion curve of liquid analyte-water was obtained. |
| |
Keywords: | SiOx doped DLC Refractive index Sensor Sub-wavelength diffraction grating |
本文献已被 ScienceDirect 等数据库收录! |