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衍射光栅槽形隆起的数学建模及演变规律
引用本文:石广丰,田在祺,史国权,郭云霞. 衍射光栅槽形隆起的数学建模及演变规律[J]. 工具技术, 2017, 51(5): 108-111. DOI: 10.3969/j.issn.1000-7008.2017.05.027
作者姓名:石广丰  田在祺  史国权  郭云霞
作者单位:1. 长春理工大学;2. 长春理工大学;中国科学院苏州生物医学工程技术研究所
摘    要:以79g/mm的中阶梯衍射光栅为目标,研究衍射光栅机械刻划过程中铝膜的槽形隆起机制。首先,经过4次坐标变换,建立了光栅槽形的塑流剖面。然后,基于Lee and Shaffer提出的滑移线场模型,在塑流剖面内建立起包含滞留区域的滑移现场模型,并根据Dewhurst and Collins提出的矩阵算法对滑移线场进行求解,最终得到槽形隆起尺寸模型。最后,通过DEFORM软件对槽形隆起尺寸的演变规律进行模拟分析。

关 键 词:衍射光栅  隆起  塑流剖面  滑移线场  滞留区

Mathematical Modeling and Evolution Rule of LateralGroove Ridges of Diffraction Gratings
Shi Guangfeng,Tian Zaiqi,Shi Guoquan,Guo Yunxia. Mathematical Modeling and Evolution Rule of LateralGroove Ridges of Diffraction Gratings[J]. Tool Engineering(The Magazine for Cutting & Measuring Engineering), 2017, 51(5): 108-111. DOI: 10.3969/j.issn.1000-7008.2017.05.027
Authors:Shi Guangfeng  Tian Zaiqi  Shi Guoquan  Guo Yunxia
Abstract:The echelle diffraction grating of 79g/mm is taken as the research object to reveal the mechanism of the lateral groove ridges on an aluminum film in the mechanical ruling process of diffraction gratings.Firstly,the plastic flow section of lateral grating groove ridges is determined after 4 coordinate transformations.Secondly,based on Lee and Shaffer's model,the slip-line field model consisting of a stagnation zone is built up in the plastic flow section.And the prediction model of the lateral groove ridges is obtained according to Dewhurst and Collins's matrix algorithm,.Lastly,by using the DEFORM software,the evolution rule of the lateral groove ridges of the diffraction grating is simulated and analyzed.
Keywords:diffraction grating  lateral ridge  plastic flow section  slip-line field model  stagnation zone
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