| 脉冲激光沉积(PLD)法制备NiZn铁氧体多晶薄膜研究 |
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| 引用本文： | 奚小网,陈亚杰,周雪琴.脉冲激光沉积(PLD)法制备NiZn铁氧体多晶薄膜研究[J].磁性材料及器件,2001,32(6):9-13. |
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| 作者姓名： | 奚小网 陈亚杰 周雪琴 |
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| 作者单位： | 1. 无锡职业技术学院,
2. 苏州大学物理系, |
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| 摘 要： | 采用脉冲激光沉积（PLD）法分别在硅和玻璃基片上沉积了NiZn铁氧体多晶薄膜。实验表明：基片温度、氧气压以及热处理对薄膜的沉积速率、磁性能有很大影响。
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| 关 键 词： | 脉冲激光沉积法 NiZn铁氧体薄膜 磁性能 基片温度 氧气压 沉积速率 |
| 文章编号： | 1001-3830(2001)06-0009-05 |
Study of Polycrystalline NiZn Ferr ite Films by Pulsed Laser Deposition |
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| XI Xiao wang ,CHEN Ya jie ,ZHOU Xue qin . Wuxi Institute of Technology,Wuxi ,China.Study of Polycrystalline NiZn Ferr ite Films by Pulsed Laser Deposition[J].Journal of Magnetic Materials and Devices,2001,32(6):9-13. |
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| Authors: | XI Xiao wang CHEN Ya jie ZHOU Xue qin Wuxi Institute of Technology Wuxi China |
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| Affiliation: | XI Xiao wang 1,CHEN Ya jie 2,ZHOU Xue qin 2 1. Wuxi Institute of Technology,Wuxi 214073,China, 2. Department of Physics,Soochow University,Suzhou 215006,China |
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| Abstract: | Polycrystalline films of NiZn ferrite were deposited on crystal Si and glass substrate by pulsed laser deposition(PLD). The experiments showed that substrate temperature, oxygen pressure and annealing process have great influence on deposition rate and magnetic properties of NiZn ferrite film. |
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| Keywords: | pulsed laser deposition NiZn ferrite film magnetic properties |
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