New generation of highly stable high-temperature microelectromechanical transducers based on a silicon-on-isolator heterostructure |
| |
| Authors: | L. V. Sokolov |
| |
| Affiliation: | 1.Research Institute of Aviation Equipment,Zhukovskii,Russia |
| |
| Abstract: | Some aspects are considered for creating a new generation of microelectromechanical transducers based on a silicon-on-isolator heterostructure with a monolithic integral tensoframe based on analyzing physicomechanical problems that restrain an increase in the technical level of semiconductor pressure transducers for information and control systems. |
| |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ |
