| 微机械电子隧穿陀螺仪研究初步研究?? |
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| 引用本文： | 苏岩,杨拥军,王寿荣,周百令.微机械电子隧穿陀螺仪研究初步研究??[J].传感技术学报,1999,12(4):223-228. |
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| 作者姓名： | 苏岩 杨拥军 王寿荣 周百令 |
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| 作者单位： | 东南大学!南京 210096(杨拥军，王寿荣)，东南大学!南京210096(周百令，苏岩) |
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| 摘 要： | 本文提出了根据微机械振动陀螺仪与电子隧道传感器相结合的设想，介绍了该型陀螺仪的工作原理，推导了陀螺仪的运动方程，从理论上阐述了该设想的可行性，仿真结果表明，该陀螺仪较电容检测陀螺仪，其灵敏度可以得到很大提高。
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| 关 键 词： | 隧道传感器 微机械陀螺仪 微机械振动 陀螺仪 |
The Preliminary Study of Micromachined Tunneling Gyroscope |
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| Su Yan,Yang Yongjun,Wang Shourong,Zhou Bailing.The Preliminary Study of Micromachined Tunneling Gyroscope[J].Journal of Transduction Technology,1999,12(4):223-228. |
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| Authors: | Su Yan Yang Yongjun Wang Shourong Zhou Bailing |
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| Affiliation: | Southeast University. Nanjing. 210096 |
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| Abstract: | This paper proposes the idea that micromachined gyroscope bonds with tunneling sensor in order to improve the performances of this gyroscope. The principle and equation of this gyroscope are introduced. The feasibility of this idea is proved in theory. The simulating results show that the sensitivity of this gyroscope will be better than those detected with capacitors. |
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| Keywords: | tunneling sensor micromachined gyroscope |
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