| 非晶金刚石离子镀膜机自动化控制系统的设计 |
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| 引用本文： | 李冬梅,赵玉清,赵华森,时立峰. 非晶金刚石离子镀膜机自动化控制系统的设计[J]. 真空电子技术, 2004, 0(1): 20-24 |
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| 作者姓名： | 李冬梅 赵玉清 赵华森 时立峰 |
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| 作者单位： | 西安交通大学,电子与科学技术系,陕西,西安,710049 |
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| 摘 要： | 结合非晶金刚石离子镀膜机的工艺特点和要求,介绍了一种成功应用的分布式控制系统的设计,重点讨论了控制系统的硬件配置、软件设计、通信服务程序以及软件编程中的几个控制算法.
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| 关 键 词： | 控制系统 非晶金刚石离子镀膜机 组态王 通信协议 |
| 文章编号： | 1002-8935(2004)01-0020-05 |
| 修稿时间： | 2003-04-04 |
Design of Amorphous Diamond Ion Plating Equipment Autocontrol System |
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| LI Dong-mei,ZHAO Yu-qing,ZHAO Hua-sen,SHI Li-feng. Design of Amorphous Diamond Ion Plating Equipment Autocontrol System[J]. Vacuum Electronics, 2004, 0(1): 20-24 |
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| Authors: | LI Dong-mei ZHAO Yu-qing ZHAO Hua-sen SHI Li-feng |
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| Abstract: | Based on the technical properties and requirements of amorphous diamond(AD) ion plating equipment , a design method of a distributed control system which has been successfully put into application is introduced in this paper. The hardware configuration, software design, communication services program and several control arithmetic of the software program are discussed in detail. |
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| Keywords: | MCS-96 |
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