| 加速器法沉积无氢类金刚石薄膜的性能与结构 |
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| 引用本文： | 王磊,黎晶.加速器法沉积无氢类金刚石薄膜的性能与结构[J].电子显微学报,1997,16(4):511-512. |
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| 作者姓名： | 王磊 黎晶 |
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| 作者单位： | 北京材料工艺研究所 |
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| 摘 要： | 本文对用加速器法（ＣＡＤ）在９Ｃｒ１８不锈轴承钢上制备的无氢类金刚石（ＨＦＤＬＣ）样品进行了显微硬度测试、磨擦磨损试验、激光扫描显微镜（ＬＳＭ）观察和透射电镜（ＴＥＭ）分析。试验结果表明用该工艺方法制 的ＨＦＤＬＣ膜具有非晶态显微结构，硬度极高，磨擦贪婪在损性能优异。
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| 关 键 词： | 加速器法 无氢类 金刚石膜 |
Properties and Microstructure of Hydrogen free Diamond like Carbon Films Prepared by Cathodic Arc Deposition |
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| L.Wang\ J.Li\ J.L.Shen\ J.S.Yang.Properties and Microstructure of Hydrogen free Diamond like Carbon Films Prepared by Cathodic Arc Deposition[J].Journal of Chinese Electron Microscopy Society,1997,16(4):511-512. |
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| Authors: | LWang\ JLi\ JLShen\ JSYang |
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| Abstract: | Microhardness,tribological characteristics and microstructure of hydrogen free diamond like carbon(HFDLC) films,which were produced on 9Cr18 stainless steel by cathodic arc deposition (CAD),were investigated with microhardness tester,pin on disk tester,laser scanning microscopy(LSM) and transmission electron microscopy (TEM). The results indicate that HFDLC films prepared by CAD have extremely high microhardness,excellent tribological behavior and an amorphous microstructure. |
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| Keywords: | \ CAD\ HFDLC |
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