Hafnium silicate nanocrystal memory using sol-gel-spin-coating method |
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Authors: | Hsin-Chiang You Tze-Hsiang Hsu Fu-Hsiang Ko Jiang-Wen Huang Tan-Fu Lei |
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Affiliation: | Inst. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan; |
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Abstract: | The authors fabricate the hafnium silicate nanocrystal memory for the first time using a very simple sol-gel-spin-coating method and 900 /spl deg/C 1-min rapid thermal annealing (RTA). From the TEM identification, the nanocrystals are formed as the charge trapping layer after 900 /spl deg/C 1-min RTA and the size is about 5 nm. They demonstrate the composition of nanocrystal is hafnium silicate from the X-ray-photoelectron-spectroscopy analysis. They verify the electric properties in terms of program/erase (P/E) speed, charge retention, and endurance. The sol-gel device exhibits the long charge retention time of 10/sup 4/ s with only 6% charge loss, and good endurance performance for P/E cycles up to 10/sup 5/. |
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