Electrostatic microgenerators of energy with a high specific power

Operation regimes of an electrical energy microgenerator based on a multilayered structure consisting of a metal, a dielectric with a built-in charge, a microgap, and a moving electrode, whose operation principle is based on electrode vibrations in the force field of the space charge of the dielectric, are analyzed. Specific features of electromechanical conversion of energy due to vibrations of the electrode surface in submicron gaps are found. It is demonstrated that such microgenerators in the low-frequency regime (10–100 Hz) can produce power sufficient for providing energy for modern microcircuits (up to 1–10 mW/cm²) without using any other power sources.