Crystallographic defects in thermally oxidized wafer bonded silicon on insulator (SOI) substrates |
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Authors: | Luis Felipe Giles Yasuo Kunii |
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Affiliation: | (1) NTT Basic Research Laboratories, 3-1 Morinosato Wakamiya, Atsugi, 243-01 Kanagawa, Japan |
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Abstract: | The crystalline quality of wafer bonded (WB) silicon on insulator (SOI) structures thermal treated in dry oxygen ambients
has been investigated by means of transmission electron microscopy and defect etching. The main crystallographic defects present
in the SOI layers are dislocations, amorphous precipitates, and oxidation induced stacking faults (OISF). The evolution of
the OISFs with time and temperature has also been investigated. The main feature observed is that the OISF in WB SOI structures
undergo a retrogrowth process at temperatures around T = 1195°C for times of t = 2h. This result is very similar to that recently
reported for oxygen implanted SOI (SIMOX) but considerably different from that observed in bulk silicon. The experimental
data fits nicely a model recently proposed for the retrogrowth of OISF in thin SOI layers. This model considers that the self-interstitial
supersaturation is considerably reduced compared to bulk silicon due to the relative fast point defect recombination inside
the top silicon layer. |
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Keywords: | Defect oxidation oxidation induced stacking fault (OISF) Si silicon on insulator (SOI) |
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