Synthesis of silicon oxynitride from a polymeric precursor |
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| Authors: | Ga -Er Yu J Parrick M Edirisinghe D Finch B Ralph |
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| Affiliation: | (1) Department of Chemistry, Brunel University, UB8 3PH Uxbridge, Middlesex, UK;(2) Department of Materials Technology, Brunel University, UB8 3PH Uxbridge, Middlesex, UK |
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| Abstract: | Proton nuclear magnetic resonance (1H NMR) spectroscopy, Fourier transform infrared (FT-IR) spectroscopy and gas chromatography (GC) have been used to study the products of ammonolysis of dichloromethylsilane in diethyl ether at 0 °C. Results indicate that the major products are trimethylcyclotrisilazane and tetramethylcyclotetrasilazane. Hydrolysis of the cyclosilazanes has also been qualitatively investigated. A simple and useful method for the identification of cyclosilazanes has been developed using the 1H NMR technique. |
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