基于凹面光栅的可调高分辨率单色仪结构设计及波长重复性分析

凹面光栅兼具成像和色散的能力，采用凹面光栅分光的单色仪能够很好实现小型化设计和应用到低于200 nm的真空紫外波段。光谱分辨率和波长重复性是单色仪的重要指标，针对单色仪的光谱分辨率，本文将光栅固有分辨率和由狭缝引起的增宽相结合推导出单色仪的光谱分辨率计算模型，利用自研微动狭缝进行实验验证，单色仪分辨率符合理论模型，极限分辨率优于0.1 nm;针对单色仪的波长重复性，在单色仪光机结构参数转换的基础上对波长重复性影响因素进行分析，推导出单色仪的波长重复性计算模型，利用汞灯作为光源进行波长重复性验证其波长重复性优于0.02 nm符合理论计算模型，验证了光机结构设计的有效性和理论分析的正确性。

Structure design and wavelength repeatability analysis of tunable high-resolution monochromator based on concave grating

Concave grating has both imaging and dispersion capabilities, monochromators using concave gratings are well miniaturised and can be applied to the vacuum UV band below 200 nm. The spectral resolution and wavelength repeatability are important indicators of monochromators, for the spectral resolution of monochromators, this paper combines the intrinsic resolution of the grating and the broadening caused by the slit to derive a model for calculating the spectral resolution of monochromators. Experimental verification using our own micromotion slit, the monochromator resolution is in accordance with the theoretical model, with a limit resolution better than 0. 1 nm. For the wavelength repeatability of monochromator, the wavelength repeatability influencing factors are analyzed on the basis of the conversion of monochromator optical machine structure parameters, the wavelength repeatability calculation model of monochromator is derived, and the wavelength repeatability using mercury lamp as the light source is verified to be better than 0. 02 nm in accordance with the theoretical calculation model, which verify the validity of the structural design of the optical machine and the correctness of the theoretical analysis.