| Ni和Ni-PTFE自润滑模具的脱模研究 |
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| 引用本文： | 张鹏,刘刚,田扬超.Ni和Ni-PTFE自润滑模具的脱模研究[J].微纳电子技术,2003(Z1). |
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| 作者姓名： | 张鹏 刘刚 田扬超 |
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| 作者单位： | 中国科学技术大学国家同步辐射实验室 安徽合肥230029
(张鹏，刘刚)，中国科学技术大学国家同步辐射实验室 安徽合肥230029(田扬超) |
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| 摘 要： | 微塑铸是LIGA技术大批量、低成本生产的关键技术。由于LIGA技术制造的微结构具有较大的高宽比 ,在脱模过程中 ,模具侧壁与塑铸材料之间会存在较大的摩擦力。这种摩擦力会损毁模具或塑铸产品 ,从而给脱模带来困难。本文制作了镍 (Ni)模具和Ni PTFE(聚四氟乙烯 )模具 ,并比较其脱模效果。试验表明 ,对同一种微结构 ,Ni PTFE模具的连续脱模次数要多于Ni模具。
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| 关 键 词： | LIGA 模具 Ni-PTFE |
Study of the demolding effects of the Ni and Ni-PTFE self-lubricated molding inserts |
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| ZHANG Peng,LIU Gang,TIAN Yang chao.Study of the demolding effects of the Ni and Ni-PTFE self-lubricated molding inserts[J].Micronanoelectronic Technology,2003(Z1). |
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| Authors: | ZHANG Peng LIU Gang TIAN Yang chao |
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| Abstract: | Micro molding is the key process for LIGA technique for low cost mass production. Due to the high aspect radio of LIGA products, there are large friction forces between the side walls of the molding inserts and plastic replicas. The friction forces can damage the plastic replicas and even the molding inserts if large enough, and it is difficult to demould in the demolding process. In this paper, Ni molding inserts and Ni PTFE molding inserts are fabricated, and the demolding effects are compared. The experiment results show that the continuous demolding times of Ni PTFE molding inserts are more than that of Ni ones for the same structure. |
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| Keywords: | LIGA molding insert Ni PTFE |
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