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集成光纤束并行共焦测量
引用本文:王昭,朱升成,谭玉山,弥宁. 集成光纤束并行共焦测量[J]. 中国激光, 2005, 32(1): 05-109
作者姓名:王昭  朱升成  谭玉山  弥宁
作者单位:西安交通大学机械工程学院激光与红外应用研究所,陕西,西安,710049
基金项目:国家自然科学基金(60077031)资助项目
摘    要:为了克服单点扫描共焦测量中速度慢、机构复杂的不足,基于并行共焦测量的思想,利用集成光纤束器件实现光束分割,同时起到共焦测量中针孔的作用。在此基础上设计了基于该器件的一套并行共焦测量系统。系统中还采用了专门设计的棱镜将光源与信号光分离。给出了系统的测量原理,说明系统具有结构简单,信噪比高等特点。初步实验表明了该系统的可行性。

关 键 词:集成光学 集成光纤束 共焦 并行测量
收稿时间:2003-08-08

Parallel Confocal Measurement though Integrated Optical Fiber Bundle Plate
WANG Zhao,ZHU Sheng-cheng,TAN Yu-shan,MI Ning. Parallel Confocal Measurement though Integrated Optical Fiber Bundle Plate[J]. Chinese Journal of Lasers, 2005, 32(1): 05-109
Authors:WANG Zhao  ZHU Sheng-cheng  TAN Yu-shan  MI Ning
Abstract:In order to solve the problems of slow scanning speed and mechanical complexity in a single point scanning confocal microscope,a new way based on the principle of multiple-beam confocal was proposed. A parallel beam becomes a series of point sources by an integrated optical fiber bundle plate. The confocal system based that device is set up. A special prism is designed to separate the signal light from illumination light in the system. The principle of this new way is described in detail and some characteristics are given. A practical setup is shown and the confocal image is got to prove its feasibility.
Keywords:integrated optics  integrated optical fiber bundle  confocal  parallel detecting
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