闭环控制的6自由度微动工作台的设计

重点探讨了弹性板簧导轨在微动工作中的应用.其目的是获的结构简单、运动精度高的多自由度微动台.微动台的基体是各部分相互间均以两组板簧导轨联接而成的整体式结构,微动台在X、Y、Z方向的线位移和绕X、Y、Z轴的角位移是由相应的微位移器产生等值同向或等值反向的推力来实现的,而位移量的大小可通过位移传感器测得,并可进行闭环反馈控制以确保相应微位移器产生等值位移.弹性板簧结构简单,无原理误差,且导轨的几何参数误差为系统误差,可以修正补偿,从设计原理上可保证微动台在各个方向的运动独立,避免相互的耦合.

Design on micro positioning table of six degrees freedom controlled by closed-loop

This paper researches the structural design on micro positioning table that has six degrees of freedom and controlled by closed-loop,and mainly studies the application of elastic leaf spring guide in the table,which aims at getting micro positioning table of simple structure and accurate moving precision with many degrees of freedom.Basal body of the table is whole structure united by two elastic leaf spring guides between parts.The corresponding micro displacements devices that generate same movement and direction or same movement and contrary direction generate linear displacement and angle displacement of X,Y,Z-axis of the table.The sensors measure the movement magnitude,and the closed-loop controlling device insures corresponding micro displacements devices to generate equal movement.The elastic leaf spring guide is simple in structure and there is no error of principle,and error of geometric parameter in the guides is systematic error,which is compensated.Meanwhile,movements of the table in directions are independent according to designing principle,which avoids reciprocal coupling.