| YX128°-LiNbO3 SAW传感器IDT的有限元仿真 |
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| 引用本文： | 薛齐齐,孙崇波,孙毅. YX128°-LiNbO3 SAW传感器IDT的有限元仿真[J]. 哈尔滨工业大学学报, 2010, 42(3): 364-367 |
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| 作者姓名： | 薛齐齐 孙崇波 孙毅 |
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| 作者单位： | 哈尔滨工业大学航天科学与力学系 |
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| 摘 要： | 为研究高频环境下的二次效应,建立了SAW传感器叉指谐振器(IDT)的二维周期有限元模型.以YX128°-LiNbO3高频SAW传感器为分析对象,定量分析了不同电极设计参数下的电极二次效应;通过谐响应分析,得到了传感器IDT电学导纳与传感器中心频率的关系,提取了IDT的谐振频率和逆谐振频率.结果表明,随着敷金比MR或电极高度EH的增大,表面波的模态频率降低,相应的表面波的速度也会降低.相同电极高度下,随着敷金比的增大,频率截止带逐渐变宽,对应的电极反射率逐渐变大.仿真提取的谐振频率为973MHz,逆谐振频率为1002MHz.
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| 关 键 词： | SAW传感器 叉指谐振器 有限元 |
FEM modeling and simulation of a YX128o-LiNbO3 SAW sensor |
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| XUE Qi-qi,SUN Chong-bo and SUN Yi. FEM modeling and simulation of a YX128o-LiNbO3 SAW sensor[J]. Journal of Harbin Institute of Technology, 2010, 42(3): 364-367 |
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| Authors: | XUE Qi-qi SUN Chong-bo SUN Yi |
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| Affiliation: | Department of Astronautic Science and Mechanics, Harbin Institute of Technology |
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| Abstract: | A two dimensional periodic finite element model of SAW sensor IDT was developed based on some assumptions and simplifications. Taking a YX128o-LiNbO3 high frequency SAW sensor as the simulation object, the electrode second order effects under different electrode design parameters were quantitatively analyzed; furthermore, the relation of the electrical admittance of the sensor IDT and center frequency was analyzed via the harmonic response analysis, and the resonance and anti-resonance frequencies of the IDT were extracted. |
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| Keywords: | SAW sensor IDT FEM |
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