Reference SAW oscillator on quartz-on-silicon (QoS) wafer forpolylithic integration of true single chip radio |
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Authors: | Yunseong Eo Seokbong Hyun Kwyro Lee Gilhwan Oh Joong-Won Lee |
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Affiliation: | Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon; |
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Abstract: | The authors present an electro-acoustic circuit fabricated on quartz directly bonded on the processed silicon wafer (QoS), which allows us to polylithically integrate high precision passives with integrated circuits. We first fabricated a prototype SAW resonator and oscillator on thick QoS. The SAW resonator on QoS shows Q about 10,000 and 11 dB insertion loss at 289 MHz, and SAW oscillator on QoS shows phase noise of as small as -120 dBc at 100 kHz offset, demonstrating the feasibility of true single chip radio |
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