氦质谱检漏仪现场校准方法研究

目前,用户采用单只标准漏孔对氦质谱检漏仪进行校准,由于受检漏仪线性范围的影响限制,不能对其全量程范围进行校准。为了满足对氦质谱检漏仪全量程范围内的现场校准,将一系列不同量级漏率的薄膜渗氦型标准漏孔分别接入氦质谱检漏仪,得到一组标准漏孔检漏仪示值,通过对标准漏孔漏率值与检漏仪示值的关系曲线进行数学拟合,得到氦质谱检漏仪全量程测量范围示值与漏率值之间的拟合公式。其校准过程简单,能够提高氦质谱检漏质量。

On the in-site calibration method for helium mass-spectrometer leak detector

At present,the whole-range calibration is impossible if using a single standard vacuum leak to calibrate a helium mass spectrometer leak detector,because such a calibration is affected by the limitation of linear range of the detector.To calibrate the leak detector in-site in the whole range,a series of leaks with helium-permeable membranes of different leakage rates were connected to a helium mass-spectrometer leak detector separately,then a set of readings of standard leaks were gained,and the relation cu...