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Preparation of multi-compositional gas sensing films by combinatorial solution deposition |
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| Authors: | Sun-Jung Kim Pyeong-Seok Cho Jong-Heun Lee Chong-Yun Kang Jin-Sang Kim Seok-Jin Yoon |
| Affiliation: | aDepartment of Materials Science and Engineering, Korea University, Anam Dong, Sungbuk-Gu, Seoul 136-713, Republic of Korea bThin Film Materials Research Center, Korea Institute of Science and Technology, Seoul 130-650, Republic of Korea |
| Abstract: | Various compositions of gas sensing films were prepared by the combinatorial deposition of SnO2, ZnO, and WO3 sol solutions and their gas sensing behaviors were investigated. The film composition could be manipulated conveniently via the alternate dropping of different oxide sol solutions. From the correlation between film compositions and gas sensitivities, the selective detection of C2H5OH and CH3COCH3 in the presence of CO, C3H8, H2, and NO2 could be attained. In addition, the discrimination between C2H5OH and CH3COCH3, which is a challenging issue due to their similar chemical nature, becomes possible. This research demonstrates the precise design of the sensor-material composition for the selective gas detection via the combinatorial approach. |
| Keywords: | A Films B Composites C Electrical properties E Sensors |
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