微复制金刚石研磨片对玻璃加工质量的影响

利用固结式微复制金刚石研磨片(Trizact Diamond Tile,TDT)对不同玻璃进行减薄研磨,确定不同粒度金刚石TDT的磨削去除率;研究了研磨后的玻璃加工质量,测量了玻璃表面粗糙度及玻璃亚表面损伤层的状态。同时用9μm粒度碳化硅浆料做对比研磨试验。结果表明,同样粒度的金刚石TDT与传统的碳化硅浆料研磨相比可以得到更高的磨削去除率,减少玻璃亚表面损伤层,降低粗糙度。对于康宁玻璃,9μm粒度的TDT可以达到95μm/min的磨削去除率,是同粒度碳化硅浆料研磨的2倍多;Ra可以达到0.37μm,明显好于碳化硅浆料研磨;亚表面损伤也减轻很多。采用2μm粒度的TDT研磨后可获得Ra0.09μm、接近透明的表面。

Effects of micron replicated trizact diamond tile (TDT) on the quality of glass substrate after lapping

Thinning lapping experiments were conducted on different kinds of screen glass using 3M micron replicated trizact diamond tile （TDT） and SiC slurry, respectively . Studies were made on the material removal rate（ MRR ） , the surface roughness , and the subsurface quality. Their material removal mechanism was also analyzed. The results indicated that, 3 M TDT had obvious advantages owing to its array structure and narrow grit size distribution . When lapping coming glass with 9 μm diamond size TDT, the MRR attained 95 μm/min , 2 times that the case using the same grit sized SiC slurry, while Ra attained 0.37 μm, much better than the case of SiC slurry. What＇s more, the subsurface defects were much remedied. When using 2 μm diamond size TDT, Ra 0.09 μm and nearly transparent surface can be obtained.