微纳力值计量标准的研究和溯源体系的建立

微牛、纳牛范围力值计量研究是目前国际计量领域的重要研究发展方向。总结了美国标准技术研究院、英国国家物理实验室、德国物理技术研究院、韩国标准和科学研究院等研究机构近年来研制的可溯源到SI的微纳力值标准装置、微纳力值传感器、参考悬臂梁以及微纳力值溯源方法。提出了微纳力值溯源体系的框架,为新材料、生物、微电子等各应用领域微纳力学特性计量量值溯源提供了技术保证。

Research on Measurement Standards and Establishment of Traceable Hierarchy of Micro-nano Force Metrology

The research of force metrology in the range from nanonewton to micronewton is an important orientation in international metrological researches at present. Up-to-date research achievements of the force standards, force sensors, reference cantilevers and traceable approaches in the range from nanonewton to micronewton in NIST, NPL, PTB and KRISS are described. A traceable hierarchy of micro-nano scale force metrology is put forward. It guarantees accuracy and consistency of dissemination for micro-nano mechanical properties testing in the field of advanced materials, biotechnology, microelectronics and etc.