利用SILVACO TCAD软件改进集成电路实践教学的研究

日益成熟的集成电路工艺与器件计算机辅助设计工具有助于缩短半导体工艺和器件的开发周期、降低开发成本,因而越来越被广泛应用。通过模拟软件Silvaco TCAD对工艺进行仿真,了解实际集成电路生产涉及的氧化、扩散、淀积、光刻、刻蚀、平坦化等一系列工艺过程;对器件的仿真,熟悉专业基础课程内容如器件的基本结构、材料的性能、载流子的浓度和工作电压等对器件各种性能的影响。并可以加深学生对课程理论的理解,同时提高学习兴趣,从而获得良好教学效果。

To improve IC practice teaching with Silvaco TCAD software

The simulation tools for technology computer aided design could be useful for time saving and cost consumption and has been more and more widely used.Based on Silvaco TCAD tools,process simulation could understand the practical integrated circuit production involved the oxidation,diffusion,deposition,photolithography,etching,CMP and a series of technological process.Devices simulation could be familiar with the professional foundation course content such as device structure,material properties,carrier concentration and voltage on the device performance influence.And can deepen students’ understanding of curriculum theory,while increasing interst in studying,so as to obtain good teaching effect.